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1

Dry Etching of Copper Using Chlorine: A Review

A. M. Efremov, V. I. Svettsov

Journal:

Russian Microelectronics

Year:

2002

Language:

english

File:

PDF, 89 KB

english, 2002

2

The two-dimensional problem of the expansion of a gas into a vacuum at arbitrary Knudsen numbers

E.F. Limar, V.V. Svettsov, V.P. Shidlovskii

Journal:

USSR Computational Mathematics and Mathematical Physics

Year:

1974

Language:

english

File:

PDF, 600 KB

english, 1974

3

Nadroparin calcium

Efremov, A. M., Yudina, A. V., Murin, D. B., Dement’ev, O. S., Svettsov, V. I.

Journal:

Reactions Weekly

Year:

2013

Language:

english

File:

PDF, 128 KB

english, 2013

4

Kinetics and concentration of active particles in nonequilibrium low temperature methane plasma

Semenova, O. A., Efremov, A. M., Barinov, S. M., Svettsov, V. I.

Journal:

High Temperature

Year:

2014

Language:

english

File:

PDF, 581 KB

english, 2014

5

SPIE Proceedings [SPIE International Conference on Micro- and Nano-Electronics 2009 - Zvenigorod, Russian Federation (Monday 5 October 2009)] International Conference on Micro- and Nano-Electronics 2009 - Plasma parameters and active particles kinetics in HBr dc glow discharges

Smirnov, A., Efremov, A., Svettsov, V., Islyaykin, A., Valiev, Kamil A., Orlikovsky, Alexander A.

Year:

2010

Language:

english

File:

PDF, 267 KB

english, 2010

6

Asteroid Apophis: Evaluating the impact hazards of such bodies

V. V. Shuvalov,V. V. Svettsov,N. A. Artem’eva,I. A. Trubetskaya…

Journal:

Solar System Research

Year:

2017

Language:

english

File:

PDF, 2.99 MB

english, 2017

7

A comparative study of plasma parameters and gas phase compositions in Cl2 and HCl direct current glow discharges

A.M. Efremov, V.I. Svettsov, D.V. Sitanov, D.I. Balashov

Journal:

Thin Solid Films

Year:

2008

Language:

english

File:

PDF, 267 KB

english, 2008

8

Application of absorption spectroscopy for studying the dissociation and interaction of chlorine with glass in a high-frequency discharge

V. I. Svettsov, A. P. Kupriyanovskaya, A. B. Maryshev

Journal:

Journal of Applied Spectroscopy

Year:

1981

Language:

english

File:

PDF, 310 KB

english, 1981

9

Emission from the positive column of a glow discharge in ammonia

V. L. Abramov, A. I. Maksimov, V. I. Svettsov

Journal:

Journal of Applied Spectroscopy

Year:

1977

Language:

english

File:

PDF, 222 KB

english, 1977

10

Explosions in the lower and middle atmosphere: The spherically symmetrical stage

Journal:

Combustion, Explosion, and Shock Waves

Year:

1994

Language:

english

File:

PDF, 943 KB

english, 1994

11

Structure of the heating layer ahead of the front of a strong intensely emitting shock wave

I. V. Nemchinov, V. V. Svettsov, V. V. Shuvalov

Journal:

Journal of Applied Mechanics and Technical Physics

Year:

1978

Language:

english

File:

PDF, 500 KB

english, 1978

12

Calculation of development of a laser explosion in air with allowance for emission

I. V. Nemchinov, V. V. Svettsov

Journal:

Journal of Applied Mechanics and Technical Physics

Year:

1977

Language:

english

File:

PDF, 667 KB

english, 1977

13

Structure and brightness of nonsteady-state supercritical shock waves in air of reduced density

I. V. Nemchinov, V. V. Svettsov, V. V. Shuvalov

Journal:

Journal of Applied Mechanics and Technical Physics

Year:

1989

Language:

english

File:

PDF, 552 KB

english, 1989

14

Explosions of meteoroids and estimating their parameters from light emission

Journal:

Combustion, Explosion, and Shock Waves

Year:

1998

Language:

english

File:

PDF, 1.16 MB

english, 1998

15

Investigation of the mechanism of formation of chlorine atoms in chlorine-hydrogen plasmas

Yu. V. Kirillov, D. V. Sitanov, V. I. Svettsov

Journal:

High Energy Chemistry

Year:

2000

Language:

english

File:

PDF, 420 KB

english, 2000

16

The role of ions and UV radiation in gallium arsenide etching process

Yu. V. Kirillov, D. V. Sitanov, V. I. Svettsov

Journal:

High Energy Chemistry

Year:

2000

Language:

english

File:

PDF, 443 KB

english, 2000

17

Use of optical emission spectroscopy for determining the number concentration of chlorine atoms in a chlorine-oxygen plasma

A. E. Skorodumov, D. V. Sitanov, V. I. Svettsov

Journal:

High Energy Chemistry

Year:

2000

Language:

english

File:

PDF, 274 KB

english, 2000

18

Nonstationary supersonic flow around a body

Journal:

Technical Physics

Year:

1999

Language:

english

File:

PDF, 60 KB

english, 1999

19

A study of the decay of atoms in chlorine plasma on aluminum films

M. Yu. Iventichev, I. S. Boikova, D. V. Sitanov, V. I. Svettsov

Journal:

High Energy Chemistry

Year:

2010

Language:

english

File:

PDF, 142 KB

english, 2010

20

The parameters of hydrogen chloride and hydrogen bromide direct-current glow-discharge plasmas

A. M. Efremov, A. A. Smirnov, V. I. Svettsov

Journal:

High Energy Chemistry

Year:

2010

Language:

english

File:

PDF, 193 KB

english, 2010

21

Spectral measurements of the probability of recombination of active particles of plasma on solid surfaces in chlorine and its mixtures with inert and molecular gases

D. V. Sitanov, V. I. Svettsov, A. M. Efremov

Journal:

High Temperature

Year:

2008

Language:

english

File:

PDF, 151 KB

english, 2008

22

The parameters of plasma and the kinetics of generation and loss of active particles in chlorine-nitrogen mixtures

A. M. Efremov, D. V. Sitanov, V. I. Svettsov

Journal:

High Temperature

Year:

2008

Language:

english

File:

PDF, 222 KB

english, 2008

23

The formation and decay of atoms in a pulsed low-frequency glow discharge in a chlorine-hydrogen mixture

M. Yu. Iventichev, D. V. Sitanov, V. I. Svettsov

Journal:

High Temperature

Year:

2010

Language:

english

File:

PDF, 240 KB

english, 2010

24

Effect of mixture composition on the electrophysical parameters and emission spectra of HCl-O2and HCl-Ar plasma

S. A. Pivovarenok, A. V. Dunaev, D. B. Murin, A. M. Efremov, V. I. Svettsov

Journal:

High Temperature

Year:

2011

Language:

english

File:

PDF, 188 KB

english, 2011

25

Kinetics and mechanisms of Cl2or HCl plasma etching of copper

A. M. Efremov, S. A. Pivovarenok, V. I. Svettsov

Journal:

Russian Microelectronics

Year:

2007

Language:

english

File:

PDF, 185 KB

english, 2007

26

Plasma parameters and etching mechanisms of metals and semiconductors in hydrogen chloride

A. M. Efremov, S. A. Pivovarenok, V. I. Svettsov

Journal:

Russian Microelectronics

Year:

2009

Language:

english

File:

PDF, 296 KB

english, 2009

27

Effect of additions of Ar and He on the parameters and composition of the HBr plasma

A. A. Smirnov, A. M. Efremov, V. I. Svettsov

Journal:

Russian Microelectronics

Year:

2010

Language:

english

File:

PDF, 341 KB

english, 2010

28

Parameters and composition of HBr plasma under the conditions of glow DC discharge

A. A. Smirnov, A. M. Efremov, V. I. Svettsov

Journal:

Russian Microelectronics

Year:

2010

Language:

english

File:

PDF, 259 KB

english, 2010

29

Determination of the probability of the heterogeneous recombination of chlorine atoms on the construction materials of plasma chemical reactors

M. Yu. Iventichev, D. V. Sitanov, V. I. Svettsov

Journal:

Russian Microelectronics

Year:

2011

Language:

english

File:

PDF, 176 KB

english, 2011

30

Electrical parameters and the plasma composition in HCl-H2mixtures

A. M. Efremov, A. V. Yudina, V. I. Svettsov

Journal:

Russian Microelectronics

Year:

2011

Language:

english

File:

PDF, 281 KB

english, 2011

31

Spectral study of HCl plasma etching of gallium arsenide

A. V. Dunaev, S. A. Pivovarenok, S. P. Kapinos, A. M. Efremov, V. I. Svettsov

Journal:

Russian Microelectronics

Year:

2011

Language:

english

File:

PDF, 149 KB

english, 2011

32

Estimates of the energy of surface waves from atmospheric explosions and the source parameters of the Tunguska event

Journal:

Izvestiya Physics of the Solid Earth

Year:

2007

Language:

english

File:

PDF, 354 KB

english, 2007

33

The parameters of plasma and the kinetics of generation and loss of active particles under conditions of discharge in chlorine

A. M. Efremov, V. I. Svettsov, D. V. Sitanov

Journal:

High Temperature

Year:

2008

Language:

english

File:

PDF, 194 KB

english, 2008

34

Evaluating Cometary Delivery of Organics to the Early Earth

Journal:

Solar System Research

Year:

2002

Language:

english

File:

PDF, 86 KB

english, 2002

35

The growth kinetics and optical properties of films deposited in methane glow discharge

S. M. Barinov, V. I. Svettsov, A. M. Efremov

Journal:

High Energy Chemistry

Year:

2012

Language:

english

File:

PDF, 308 KB

english, 2012

36

Crater ejecta: Markers of impact catastrophes

V. V. Shuvalov, N. A. Artemieva, M. Yu. Kuz’micheva, T. V. Losseva, V. V. Svettsov, V. M. Khazins

Journal:

Izvestiya Physics of the Solid Earth

Year:

2012

Language:

english

File:

PDF, 702 KB

english, 2012

37

An estimate for the size of the area of damage on the Earth’s surface after impacts of 10–300-m asteroids

Shuvalov, V. V., Svettsov, V. V., Trubetskaya, I. A.

Journal:

Solar System Research

Year:

2013

Language:

english

File:

PDF, 456 KB

english, 2013

38

Plasma parameters and mechanisms of GaAs reactive plasma etching in mixtures of HCl with argon and chlorine

A. V. Dunaev, S. A. Pivovarenok, A. M. Efremov, V. I. Svettsov…

Journal:

Russian Microelectronics

Year:

2013

Language:

english

File:

PDF, 217 KB

english, 2013

39

Hyaluronidase

Efremov, A. M., Yudina, A. V., Murin, D. B., Dement’ev, O. S., Svettsov, V. I.

Journal:

Reactions Weekly

Year:

2013

Language:

english

File:

PDF, 128 KB

english, 2013

40

Colchichine/simvastatin interaction

Efremov, A. M., Yudina, A. V., Murin, D. B., Dement’ev, O. S., Svettsov, V. I.

Journal:

Reactions Weekly

Year:

2013

Language:

english

File:

PDF, 128 KB

english, 2013

41

Bevacizumab

Efremov, A. M., Yudina, A. V., Murin, D. B., Dement’ev, O. S., Svettsov, V. I.

Journal:

Reactions Weekly

Year:

2013

Language:

english

File:

PDF, 128 KB

english, 2013

42

Piperacillin/tazobactam

Efremov, A. M., Yudina, A. V., Murin, D. B., Dement’ev, O. S., Svettsov, V. I.

Journal:

Reactions Weekly

Year:

2013

Language:

english

File:

PDF, 128 KB

english, 2013

43

Kinetics and concentration of chlorine atoms in hydrogen chloride-argon plasma

Efremov, A. M., Yudina, A. V., Murin, D. B., Dement’ev, O. S., Svettsov, V. I.

Journal:

High Energy Chemistry

Year:

2013

Language:

english

File:

PDF, 177 KB

english, 2013

44

Development of semitransparent plasma bunches under the influence of laser radiation

Kosarev, I B, Loseva, T V, Svettsov, V V

Journal:

Soviet Journal of Quantum Electronics

Year:

1990

Language:

english

File:

PDF, 473 KB

english, 1990

45

Appearance of a layer absorbing laser radiation near the surface of a metal target

Bergel'son, V I, Golub', A P, Loseva, T V, Nemchinov, I V, Orlova, T I, Popov, S P, Svettsov, V V

Journal:

Soviet Journal of Quantum Electronics

Year:

1974

File:

PDF, 155 KB

1974

46

Planar laser explosion near a target in air

I. V. Nemchinov, I. A. Polozova, V. V. Svettsov, V. V. Shuvalov

Year:

1979

Language:

english

File:

PDF, 522 KB

english, 1979

47

Determination of the height of the “meteoric explosion”

Shuvalov, V. V., Popova, O. P., Svettsov, V. V., Trubetskaya, I. A., Glazachev, D. O.

Journal:

Solar System Research

Year:

2016

Language:

english

File:

PDF, 1.36 MB

english, 2016

48

SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Volume and heterogeneous chemistry in Cl2/Ar inductively coupled plasma

Efremov, Alexander, Svettsov, Vladimir, Kim, Chang-Il, Valiev, Kamil A., Orlikovsky, Alexander A.

Year:

2012

Language:

english

File:

PDF, 301 KB

english, 2012

49

SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Etching mechanism of Au thin films in Cl2/Ar inductively coupled plasma

Efremov, Alexander, Svettsov, Vladimir, Kim, Chang-Il, Valiev, Kamil A., Orlikovsky, Alexander A.

Year:

2012

Language:

english

File:

PDF, 325 KB

english, 2012

50

SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - A self-consistent model for the HCl dc glow discharge: plasma parameters and active particles kinetics

Efremov, A. M., Svettsov, V. I., Valiev, Kamil A., Orlikovsky, Alexander A.

Year:

2012

Language:

english

File:

PDF, 320 KB

english, 2012

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